Site Selection and Building Design for Minimizing Vibration

by James T. Nelson, Wilson, Ihrig & Associates Inc, Oakland, CA, USA,
Warren E. Blazier, Wilson, Ihrig & Associates Inc, Oakland, CA, USA,
Hugh J. Saurenman, Wilson, Ihrig & Associates Inc, Oakland, CA, USA,

Document Type: Proceeding Paper

Part of: Noise and Vibration Measurement: Prediction and Mitigation


Over the last five to ten years, line resolutions required for state-of-the-art semi-conductor wafers have dropped to well below 1 micron. As a result, controlling environmental building vibration caused by sources both within and without a production facility has become very important. A number of steps can be taken to ensure that the vibration environment will be satisfactory for vibration sensitive equipment. These include (1) performing ground vibration surveys to aid site selection for a new facility; (2) performing vibration surveys within existing buildings to determine appropriate locations for vibration sensitive equipment and processes; (3) reviewing vibration specifications for sensitive equipment; (4) providing special vibration control measures in the building foundation and structural design; and (5) vibration isolation of building mechanical equipment. With careful attention to the vibration environment and specifications for vibration sensitive equipment, vibration problems in the semi-conductor industry can usually be avoided.

Subject Headings: Building design | Equipment and machinery | Site investigation | Vibration | Surveying instruments | Foundation design | Industrial facilities | Environmental issues

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