Factories for the Information Ageby Clifford R. Paul, P.E., Owner; Paul-Koehler Consulting Structural Engineers, Inc., Scottsdale, AZ,
Serial Information: Civil Engineering—ASCE, 1997, Vol. 67, Issue 12, Pg. 57-59
Document Type: Feature article
Abstract: As the demand for computer chips continues to soar, designers of microelectronics manufacturing facilities must keep pace with exacting building requirements. Successful projects require that the structural engineering team be involved from the earliest phases of the project through construction. Because chip manufacturing equipment is highly sensitive, and unwanted movement will damage the microscopic elements of the circuits etched into the chips, vibration control during production is critical. The production environment also must be free of airborne particles that could interfere with the manufacturing process.
Subject Headings: Computers | Environmental issues | Facilities | Industrial facilities | Structural design | Vibration
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