Design of High-Technology Facilities from the Vibration Standpointby Eric E. Ungar, BBN Lab Inc, Cambridge, MA, USA,
Document Type: Proceeding Paper
Part of: Designing for High Technology Use
High-technology facilities, such as those used for the production of integrated circuits or for optics research, generally require extremely limited vibration environments. Suitable precautions must be taken in the design of such facilities to avoid unacceptably severe vibrations produced by ground motions, personnel activities and mechanical equipment. Selection of suitable criteria is the first logical step in cost-efficient facility design; recommended vibration criteria are discussed in the first of the following sections. The remainder of this paper presents an overview of the important vibration sources and provides general guidance concerning means for reducing the generated vibrations and their effects.
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