Cost-Effective Design of Practically Vibration-Free High-Technology Facilitiesby Eric E. Ungar, BBN Lab, Cambridge, MA, USA,
Colin G. Gordon, BBN Lab, Cambridge, MA, USA,
Document Type: Proceeding Paper
Part of: Noise and Vibration Measurement: Prediction and Mitigation
Advanced electro-optical equipment, such as that used in the production of integrated circuits, requires clean environments with extremely limited vibrations. Ground motions, personnel activities, and mechanical equipment tend to produce unacceptable severe vibrations in high-technology facilities, unless suitable precautions are taken. Recommended vibration criteria, an overview of the important vibration sources, general guidance and means for control of vibrations produced by external sources, interior activities, and mechanical equipment are provided.
Services: Buy this book/Buy this article
Return to search